Inventor
HUNG RAYMOND
US19 patents
Patents
19 patentsUS6077384AJun 20, 2000
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC237 citations98
US6054013AApr 25, 2000
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC596 citations98
US6623596B1Sep 23, 2003
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC84 citations97
US6238588B1May 29, 2001
High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process
APPLIED MATERIALS INC84 citations97
US6174451B1Jan 16, 2001
Oxide etch process using hexafluorobutadiene and related unsaturated hydrofluorocarbons
APPLIED MATERIALS INC94 citations97
US6524432B1Feb 25, 2003
Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC49 citations95
US6440864B1Aug 27, 2002
Substrate cleaning process
APPLIED MATERIALS INC119 citations95
US6613691B1Sep 2, 2003
Highly selective oxide etch process using hexafluorobutadiene
APPLIED MATERIALS INC17 citations92
US5965035AOct 12, 1999
Self aligned contact etch using difluoromethane and trifluoromethane
APPLIED MATERIALS INC46 citations92
US6329292B1Dec 11, 2001
Integrated self aligned contact etch
APPLIED MATERIALS INC25 citations88
US6027606AFeb 22, 2000
Center gas feed apparatus for a high density plasma reactor
APPLIED MATERIALS INC22 citations88
US6193836B1Feb 27, 2001
Center gas feed apparatus for a high density plasma reactor
APPLIED MATERIALS INC9 citations74
US10475655B2Nov 12, 2019
Selective deposition of metal silicides
APPLIED MATERIALS INC2 citations70
US12347695B2Jul 1, 2025
Methods for controlling contact resistance in cobalt-titanium structures
APPLIED MATERIALS INC0 citations61
US11626288B2Apr 11, 2023
Integrated contact silicide with tunable work functions
APPLIED MATERIALS INC0 citations61
US11424132B2Aug 23, 2022
Methods and apparatus for controlling contact resistance in cobalt-titanium structures
APPLIED MATERIALS INC0 citations61
US12550662B2Feb 10, 2026
Integrated process flows for hybrid bonding
APPLIED MATERIALS INC0 citations52
US11417568B2Aug 16, 2022
Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill
APPLIED MATERIALS INC0 citations51
US10586707B2Mar 10, 2020
Selective deposition of metal silicides
APPLIED MATERIALS INC0 citations49