Inventor · disambiguated record
Don E. Anderson
Also filed as: ANDERSON DON · ANDERSON DON E
5 granted patents·1 pending application·137 citations·filing 1999–2004
81Inventor score
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0195US6361414B1Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization processLAM RES CORP·Filed 2000·Granted Mar 26, 2002·83 cites·20 claims
- 0286US6622335B1Drip manifold for uniform chemical deliveryLAM RES CORP·Filed 2000·Granted Sep 23, 2003·32 cites·22 claims
- 0348US6711775B2System for cleaning a semiconductor waferLAM RES CORP·Filed 1999·Granted Mar 30, 2004·12 cites·12 claims
- 0443US6827793B2Drip manifold for uniform chemical deliveryLAM RES CORP·Filed 2003·Granted Dec 7, 2004·0 cites·20 claims
- 0543US6261407B1Method and apparatus for removal of thin films from wafersLAM RES CORP·Filed 1999·Granted Jul 17, 2001·10 cites·12 claims
- 0642US2004216764A1Method and system for cleaning a semiconductor waferLAM RES CORP·Filed 2004·Application pending·0 cites
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