Inventor · disambiguated record
Muh-Wang Liang
Also filed as: LIANG MUH-WANG
16 granted patents·13 pending applications·146 citations·filing 1993–2020
91Inventor score
Top patents by PatentIndex Score
29 records- 0192US6622883B1Door for wafer container having rotatable cammed member and movable linksIND TECH RES INST·Filed 2000·Granted Sep 23, 2003·81 cites·20 claims
- 0276US7449091B2Wafer electroplating apparatusIND TECH RES INST·Filed 2005·Granted Nov 11, 2008·2 cites·20 claims
- 0371US9204950B2Plasma generator, surface treatment method using the same and surface treatment method using the same for bio-tissueIND TECH RES INST·Filed 2013·Granted Dec 8, 2015·7 cites·23 claims
- 0467US7021208B2Compress and position apparatusIND TECH RES INST·Filed 2004·Granted Apr 4, 2006·7 cites·14 claims
- 0558US11680316B2Deposition apparatusIND TECH RES INST·Filed 2020·Granted Jun 20, 2023·0 cites·16 claims
- 0658US6997664B1Apparatus for loading/unloading wafers to and from semiconductor fabrication equipmentIND TECH RES INST·Filed 2000·Granted Feb 14, 2006·7 cites·7 claims
- 0757US6653235B2Fabricating process for forming multi-layered metal bumps by electroless platingIND TECH RES INST·Filed 2001·Granted Nov 25, 2003·10 cites·17 claims
- 0857US2011073038A1Gas distribution plate and apparatus using the sameIND TECH RES INST·Filed 2009·Application pending·0 cites
- 0954US5370524AClamping unit and method for an injection molding machineIND TECH RES INST·Filed 1993·Granted Dec 6, 1994·20 cites·2 claims
- 1054US2009090616A1System and method for plasma enhanced thin film depositionIND TECH RES INST·Filed 2008·Application pending·0 cites
- 1152US2014144377A1Substrate and mask attachment clamp deviceIND TECH RES INST·Filed 2013·Application pending·0 cites
- 1251US6592322B2Personal guided transport vehicleIND TECH RES INST·Filed 2001·Granted Jul 15, 2003·6 cites·19 claims
- 1350US6653245B2Method for liquid phase depositionIND TECH RES INST·Filed 2001·Granted Nov 25, 2003·4 cites·3 claims
- 1450US2009151637A1Microwave-excited plasma source using ridged wave-guide line-type microwave plasma reactorIND TECH RES INST·Filed 2008·Application pending·0 cites
- 1549US10591216B2Solidifying deviceIND TECH RES INST·Filed 2017·Granted Mar 17, 2020·0 cites·20 claims
- 1648US2010141147A1Capacitively coupled plasma (ccp) generator with two input portsIND TECH RES INST·Filed 2009·Application pending·0 cites
- 1748US2010164381A1Long linear-type microwave plasma source using variably-reduced-height rectangular waveguide as plasma reactorIND TECH RES INST·Filed 2009·Application pending·0 cites
- 1847US8198793B2Cathode discharge apparatusTUNG FU-CHING·Filed 2009·Granted Jun 12, 2012·0 cites·19 claims
- 1946US2010116623A1Transmission device for thin and brittleness substrateIND TECH RES INST·Filed 2009·Application pending·0 cites
- 2043US2009283042A1Susceptor positioning and supporting device of vacuum apparatusIND TECH RES INST·Filed 2008·Application pending·0 cites
- 2138US2012240855A1Transmission mechanism and the deposition apparatus using the sameDU CHEN-CHUNG·Filed 2011·Application pending·0 cites
- 2236US2003219978A1Method and apparatus for liquid phase depositionIND TECH RES INST·Filed 2002·Application pending·0 cites
- 2335US2011305846A1Apparatus and method for surface processingCHIEN JUNG-CHEN·Filed 2010·Application pending·0 cites
- 2434US8435803B2Method for depositing microcrystalline silicon and monitor device of plasma enhanced depositionDU CHEN-CHUNG·Filed 2010·Granted May 7, 2013·0 cites·11 claims
- 2534US6669185B2Wafer loading system positioning method and deviceIND TECH RES INST·Filed 2000·Granted Dec 30, 2003·0 cites·13 claims
- 2632US6803329B2Method for low temperature liquid-phase deposition and method for cleaning liquid-phase deposition apparatusIND TECH RES INST·Filed 2003·Granted Oct 12, 2004·0 cites·6 claims
- 2731US2011132758A1Structure for increasing utilization rate of targetIND TECH RES INST·Filed 2010·Application pending·0 cites
- 2831US2012111269A1View port device for plasma process and process observation device of plasma apparatusDU CHEN-CHUNG·Filed 2011·Application pending·0 cites
- 2925US6382945B1Resin plunging apparatus for molding resin to seal an electronic deviceIND TECH RES INST·Filed 1999·Granted May 7, 2002·2 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →