Inventor · disambiguated record
Tain-Chen Hu
Also filed as: HU TAIN-CHEN
3 granted patents·25 citations·filing 1996–2002
66Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0171US6553335B2Method and apparatus for determining end-point in a chamber cleaning processTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Apr 22, 2003·19 cites·15 claims
- 0249US6688344B2Container flush and gas charge system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 10, 2004·4 cites·19 claims
- 0322US5896852AChemical reactant bottle and method of use thereofTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Apr 27, 1999·2 cites·18 claims
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