Inventor · disambiguated record
Atsushi Tonai
Also filed as: TONAI ATSUSHI
4 granted patents·1 pending application·114 citations·filing 1997–2002
78Inventor score
Files withCATALYSTS & CHEM IND CO4
Top patents by PatentIndex Score
5 records- 0183US6340641B1Substrate flattening method and film-coated substrate made therebyCATALYSTS & CHEM IND CO·Filed 1997·Granted Jan 22, 2002·47 cites·20 claims
- 0279US6562465B1Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a filmCATALYSTS & CHEM IND CO·Filed 1999·Granted May 13, 2003·45 cites·22 claims
- 0356US6086699AThin film-forming method and thin film-forming apparatus thereforCATALYSTS & CHEM IND CO·Filed 1998·Granted Jul 11, 2000·21 cites·10 claims
- 0446US7163892B2Process for producing integrated circuit, and substrate with integrated circuitCATALYSTS & CHEM IND CO·Filed 2001·Granted Jan 16, 2007·1 cites·13 claims
- 0532US2005046782A1Liquid crystal display cellFiled 2002·Application pending·0 cites
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