Inventor · disambiguated record
Shouliang Lai
Also filed as: LAI SHOULIANG
9 granted patents·2 pending applications·110 citations·filing 1998–2014
88Inventor score
Top patents by PatentIndex Score
11 records- 0184US6924235B2Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching methodUNAXIS USA INC·Filed 2003·Granted Aug 2, 2005·33 cites·17 claims
- 0278US6809612B2Dielectric block signal filters with cost-effective conductive coatingsCTS CORP·Filed 2002·Granted Oct 26, 2004·16 cites·38 claims
- 0373US6259185B1Metallization for high power handling in a surface acoustic wave device and method for providing sameCTS CORP·Filed 1998·Granted Jul 10, 2001·28 cites·17 claims
- 0472US7381650B2Method and apparatus for process control in time division multiplexed (TDM) etch processesUNAXIS USA INC·Filed 2005·Granted Jun 3, 2008·5 cites·35 claims
- 0570US7959819B2Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processesLAI SHOULIANG·Filed 2005·Granted Jun 14, 2011·4 cites·4 claims
- 0667US6905626B2Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasmaUNAXIS USA INC·Filed 2003·Granted Jun 14, 2005·11 cites·16 claims
- 0764US7829465B2Method for plasma etching of positively sloped structuresLAI SHOULIANG·Filed 2007·Granted Nov 9, 2010·3 cites·26 claims
- 0855US7115520B2Method and apparatus for process control in time division multiplexed (TDM) etch processUNAXIS USA INC·Filed 2004·Granted Oct 3, 2006·5 cites·31 claims
- 0952US2014150246A1Apparatus and Method for Carrying SubstratesPLASMA THERM LLC·Filed 2014·Application pending·0 cites
- 1050US6452305B1High power surface acoustic wave deviceMOTOROLA INC·Filed 2000·Granted Sep 17, 2002·5 cites·10 claims
- 1150US2007217119A1Apparatus and Method for Carrying SubstratesJOHNSON DAVID·Filed 2007·Application pending·0 cites
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