Inventor · disambiguated record
Jong Won Shon
Also filed as: SHON JONG WON
6 granted patents·1 pending application·382 citations·filing 2008–2025
79Inventor score
Top patents by PatentIndex Score
7 records- 0198US10190214B2Deposition apparatus and deposition system having the sameASM IP HOLDING BV·Filed 2016·Granted Jan 29, 2019·378 cites·27 claims
- 0286US12270118B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2024·Granted Apr 8, 2025·0 cites·20 claims
- 0385US10738381B2Thin film deposition apparatusASM IP HOLDING BV·Filed 2016·Granted Aug 11, 2020·2 cites·19 claims
- 0481US10876218B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2017·Granted Dec 29, 2020·2 cites·8 claims
- 0580US2025207287A1Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0672US11965262B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2020·Granted Apr 23, 2024·0 cites·20 claims
- 0733US8293651B2Method of forming thin film pattern for semiconductor device and apparatus for the sameKIM HUI-TAE·Filed 2008·Granted Oct 23, 2012·0 cites·14 claims
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