Inventor · disambiguated record
Tetsuji Kazaana
Also filed as: KAZAANA TETSUJI
2 granted patents·1 pending application·3 citations·filing 2006–2014
37Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0172US10031429B2Method of obtaining position, exposure method, and method of manufacturing articleCANON KK·Filed 2014·Granted Jul 24, 2018·3 cites·27 claims
- 0235US2009310112A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 0331US7829263B2Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing methodCANON KK·Filed 2006·Granted Nov 9, 2010·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →