Inventor · disambiguated record
Fuyuhiko Inoue
Also filed as: INOUE FUYUHIKO
14 granted patents·2 pending applications·427 citations·filing 1986–2016
94Inventor score
Top patents by PatentIndex Score
16 records- 0196US6665054B2Two stage methodNIKON CORP·Filed 2001·Granted Dec 16, 2003·79 cites·16 claims
- 0287US5617182AScanning exposure methodNIKON CORP·Filed 1994·Granted Apr 1, 1997·49 cites·17 claims
- 0384US6724464B2Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2001·Granted Apr 20, 2004·28 cites·13 claims
- 0484US6160628AInterferometer system and method for lens column alignmentNIKON CORP·Filed 1999·Granted Dec 12, 2000·54 cites·28 claims
- 0583USH1972HAutofocus system using common path interferometryNIPPON KOGAKU KK·Filed 1998·Granted Jul 3, 2001·51 cites·13 claims
- 0681US6813022B2Interferometer systemNIKON CORP·Filed 2001·Granted Nov 2, 2004·19 cites·9 claims
- 0780US6674512B2Interferometer system for a semiconductor exposure systemNIKON CORP·Filed 2001·Granted Jan 6, 2004·25 cites·43 claims
- 0879US6785005B2Switching type dual wafer stageNIKON CORP·Filed 2001·Granted Aug 31, 2004·17 cites·28 claims
- 0979US4971413ALaser beam depicting apparatusNIKON CORP·Filed 1988·Granted Nov 20, 1990·41 cites·10 claims
- 1074US6509971B2Interferometer systemNIKON CORP·Filed 2001·Granted Jan 21, 2003·17 cites·21 claims
- 1173US4761561ALaser beam scanning pattern generation system with positional and dimensional error correctionNIPPON KOGAKU KK·Filed 1986·Granted Aug 2, 1988·38 cites·17 claims
- 1263US6714282B2Position detecting method optical characteristic measuring method and unit, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2001·Granted Mar 30, 2004·7 cites·20 claims
- 1339US2003020924A1Interferometer systemFiled 2001·Application pending·0 cites
- 1438US2002159048A1Wavefront aberration measuring method and unit, exposure apparatus, device manufacturing method, and deviceNIKON CORP·Filed 2002·Application pending·0 cites
- 1537US11231608B2Optical component comprising liquid crystals in a blue phase and process for making such optical componentNIKON CORP·Filed 2016·Granted Jan 25, 2022·0 cites·8 claims
- 1633USRE38176EScanning exposure methodNIPPON KOGAKU KK·Filed 1999·Granted Jul 8, 2003·2 cites·32 claims
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