Inventor · disambiguated record
Gek Soon Chua
Also filed as: CHUA GEK SOON
15 granted patents·19 citations·filing 2005–2016
87Inventor score
Files withCHARTERED SEMICONDUCTOR MFG5GLOBALFOUNDRIES SG PTE LTD5CHUA GEK SOON1GLOBAL FOUNDRIES SINGAPORE PTE LTD1LING MOH LUNG1
Top patents by PatentIndex Score
15 records- 0186US7560199B2Polarizing photolithography systemCHARTERED SEMICONDUCTOR MFG·Filed 2005·Granted Jul 14, 2009·9 cites·20 claims
- 0271US9053269B1System and methods for OPC model accuracy management and dispositionGLOBALFOUNDRIES SG PTE LTD·Filed 2013·Granted Jun 9, 2015·3 cites·19 claims
- 0365US7867698B2Reticle system for manufacturing integrated circuit systemsCHARTERED SEMICONDUCTOR MFG·Filed 2008·Granted Jan 11, 2011·2 cites·32 claims
- 0461US9122160B2Method and apparatus for performing optical proximity and photomask correctionCHUA GEK SOON·Filed 2013·Granted Sep 1, 2015·2 cites·11 claims
- 0556US8450046B2Methods for enhancing photolithography patterningLING MOH LUNG·Filed 2009·Granted May 28, 2013·2 cites·17 claims
- 0654US8413083B2Mask system employing substantially circular optical proximity correction target and method of manufacture thereofTAN SIA KIM·Filed 2009·Granted Apr 2, 2013·1 cites·20 claims
- 0752US7923180B2Cross technology reticlesCHARTERED SEMICONDUCTOR MFG·Filed 2009·Granted Apr 12, 2011·0 cites·18 claims
- 0849US9395621B2Pellicles and devices comprising a photomask and the pellicleGLOBALFOUNDRIES SG PTE LTD·Filed 2014·Granted Jul 19, 2016·0 cites·20 claims
- 0948US7866224B2Monitoring structureCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted Jan 11, 2011·0 cites·11 claims
- 1047US9286435B2System and methods for OPC model accuracy management and dispositionGLOBALFOUNDRIES SG PTE LTD·Filed 2015·Granted Mar 15, 2016·0 cites·20 claims
- 1147US9257277B2Methods for extreme ultraviolet mask defect mitigation by multi-patterningGLOBALFOUNDRIES SG PTE LTD·Filed 2014·Granted Feb 9, 2016·0 cites·9 claims
- 1247US7674562B2Angled-wedge chrome-face wall for intensity balance of alternating phase shift maskCHARTERED SEMICONDUCTOR MFG·Filed 2005·Granted Mar 9, 2010·0 cites·9 claims
- 1346US8898597B2Etch failure prediction based on wafer resist top lossYANG QING·Filed 2013·Granted Nov 25, 2014·0 cites·15 claims
- 1443US8034543B2Angled-wedge chrome-face wall for intensity balance of alternating phase shift maskGLOBAL FOUNDRIES SINGAPORE PTE LTD·Filed 2010·Granted Oct 11, 2011·0 cites·18 claims
- 1541US9673111B2Methods for extreme ultraviolet mask defect mitigation by multi-patterningGLOBALFOUNDRIES SG PTE LTD·Filed 2016·Granted Jun 6, 2017·0 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →