Inventor · disambiguated record
Kiyomitsu Yamaguchi
Also filed as: YAMAGUCHI KIYOMITSU
9 granted patents·257 citations·filing 1997–2017
90Inventor score
Top patents by PatentIndex Score
9 records- 0191US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 0284US6770149B2Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2002·Granted Aug 3, 2004·19 cites·5 claims
- 0380US5945161AApparatus and method for supplying process solution to surface of substrate to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·60 cites·21 claims
- 0474US6062240ATreatment deviceTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·45 cites·29 claims
- 0574US5906860AApparatus for treating a substrate with resist and resist-treating methodTOKYO ELECTRON LTD·Filed 1997·Granted May 25, 1999·49 cites·27 claims
- 0671US6391110B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·15 cites·4 claims
- 0768US6398879B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·10 cites·6 claims
- 0865US8222569B2Heat-treating apparatus, heat-treating method and storage mediumSAKAI YUICHI·Filed 2008·Granted Jul 17, 2012·2 cites·9 claims
- 0953US11427920B2Electrolytic processing jig and electrolytic processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Aug 30, 2022·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →