Inventor · disambiguated record
Wataru Tsukinoki
Also filed as: TSUKINOKI WATARU
6 granted patents·2 pending applications·34 citations·filing 2008–2025
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0195US12322631B2Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Jun 3, 2025·4 cites·10 claims
- 0284US8731701B2Substrate treatment method and substrate treatment systemTSUKINOKI WATARU·Filed 2008·Granted May 20, 2014·12 cites·22 claims
- 0383US8043039B2Substrate treatment apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Oct 25, 2011·10 cites·9 claims
- 0477US8909364B2Substrate processing system and substrate processing methodTSUKINOKI WATARU·Filed 2011·Granted Dec 9, 2014·5 cites·12 claims
- 0573US2025266277A1Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0667US8219233B2Substrate treatment apparatusTSUKINOKI WATARU·Filed 2010·Granted Jul 10, 2012·3 cites·6 claims
- 0746US8369977B2Coating and developing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Feb 5, 2013·0 cites·20 claims
- 0833US2010212585A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →