Inventor · disambiguated record
Hiromi Hara
Also filed as: HARA HIROMI
13 granted patents·1 pending application·130 citations·filing 1991–2025
88Inventor score
Top patents by PatentIndex Score
14 records- 0195US12322631B2Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Jun 3, 2025·4 cites·10 claims
- 0290US6120222AMachine toolMAKINO MILLING MACHINE·Filed 1997·Granted Sep 19, 2000·59 cites·25 claims
- 0386US5192139AApparatus for cooling a spindle bearing of a machineMAKINO MILLING MACHING CO LTD·Filed 1991·Granted Mar 9, 1993·58 cites·22 claims
- 0477US10032642B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 24, 2018·2 cites·6 claims
- 0574US8777695B2Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning methodSATO HIDEAKI·Filed 2010·Granted Jul 15, 2014·4 cites·9 claims
- 0673US10607849B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2018·Granted Mar 31, 2020·1 cites·6 claims
- 0773US2025266277A1Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0864US8803039B2Heating unit, substrate processing apparatus, and method for heating fluidSATO HIDEAKI·Filed 2009·Granted Aug 12, 2014·2 cites·14 claims
- 0959US11056360B2Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing programTOKYO ELECTRON LTD·Filed 2019·Granted Jul 6, 2021·0 cites·4 claims
- 1047US10460964B2Substrate liquid processing apparatus and method, and computer-readable storage medium stored with substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Oct 29, 2019·0 cites·6 claims
- 1142US9887092B2Etching method, etching apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 6, 2018·0 cites·13 claims
- 1240US11062922B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 13, 2021·0 cites·12 claims
- 1334US10985035B2Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded thereinTOKYO ELECTRON LTD·Filed 2015·Granted Apr 20, 2021·0 cites·11 claims
- 1432US10811266B2Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Oct 20, 2020·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →