Inventor · disambiguated record
Rae-Won Yi
Also filed as: YI RAE WON
5 granted patents·2 citations·filing 2010–2016
64Inventor score
Top patents by PatentIndex Score
5 records- 0171US9897554B2Method of inspecting surface and method of inspecting photomask using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 20, 2018·1 cites·20 claims
- 0260US9529960B2Photolithography patterning system using feature parametersSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Dec 27, 2016·1 cites·8 claims
- 0347US9017904B2Methods of providing photolithography patterns using feature parametersCHOI JIN·Filed 2013·Granted Apr 28, 2015·0 cites·25 claims
- 0443US9892884B2Exposure apparatus and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 13, 2018·0 cites·16 claims
- 0543US8465884B2Electron beam depicting pattern design, photomask, methods of depicting and fabricating photomask, and method of fabricating semiconductor device using the sameCHOI JIN·Filed 2010·Granted Jun 18, 2013·0 cites·14 claims
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