Inventor · disambiguated record
Maureen Petterson
Also filed as: PETTERSON MAUREEN · PETTERSON MAUREEN K
13 granted patents·25 citations·filing 2015–2020
87Inventor score
Top patents by PatentIndex Score
13 records- 0188US10310379B2Multiple patterning approach using ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 4, 2019·5 cites·18 claims
- 0288US9659784B1Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 23, 2017·5 cites·16 claims
- 0386US11324973B2Multi-color charged particle detector apparatus and method of use thereofPETTERSON MAUREEN·Filed 2020·Granted May 10, 2022·2 cites·7 claims
- 0485US10665433B2Extreme edge uniformity controlVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted May 26, 2020·3 cites·16 claims
- 0581US11000705B2Relativistic energy compensating cancer therapy apparatus and method of use thereofLEE W DAVIS·Filed 2018·Granted May 11, 2021·4 cites·17 claims
- 0676US9520290B1Ion implantation for improved etch performanceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 13, 2016·2 cites·19 claims
- 0773US10532228B2Multi-color charged particle detector apparatus and method of use thereofPETTERSON MAUREEN·Filed 2018·Granted Jan 14, 2020·3 cites·10 claims
- 0866US11574800B2Extreme edge uniformity controlVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Feb 7, 2023·0 cites·6 claims
- 0965US10898732B2Multi-color charged particle detector apparatus and method of use thereofPETTERSON MAUREEN·Filed 2019·Granted Jan 26, 2021·1 cites·2 claims
- 1055US9885957B2Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 6, 2018·0 cites·14 claims
- 1148US11053580B2Techniques for selective deposition using angled ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 6, 2021·0 cites·16 claims
- 1242US9512517B2Multiple exposure treatment for processing a patterning featureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 6, 2016·0 cites·20 claims
- 1338US9735013B2Ion implantation for improved contact hole critical dimension uniformityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 15, 2017·0 cites·18 claims
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