Inventor · disambiguated record

Souichi Asakawa

Also filed as: ASAKAWA SOUICHI

1 granted patent·11 citations·filing 2006–2006

33Inventor score

Technology areasH10P

Files withEBARA CORP1

Top patents by PatentIndex Score

1 record

0185US8029333B2Device for polishing peripheral edge of semiconductor waferEBARA CORP·Filed 2006·Granted Oct 4, 2011·11 cites·28 claims

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