Inventor · disambiguated record
Tetsuya Karita
Also filed as: KARITA TETSUYA
4 granted patents·163 citations·filing 1997–2000
80Inventor score
Top patents by PatentIndex Score
4 records- 0190US6440326B1Photoresist removing compositionMITSUBISHI GAS CHEMICAL CO·Filed 2000·Granted Aug 27, 2002·57 cites·13 claims
- 0280US6265309B1Cleaning agent for use in producing semiconductor devices and process for producing semiconductor devices using the sameMITSUBISHI GAS CHEMICALS CO IN·Filed 1999·Granted Jul 24, 2001·78 cites·24 claims
- 0353US5846695ARemoving agent composition for a photoresist and process for producing a semiconductor integrated circuitMITSUBISHI GAS CHEMICAL CO·Filed 1997·Granted Dec 8, 1998·19 cites·19 claims
- 0445US6500270B2Resist film removing composition and method for manufacturing thin film circuit element using the compositionSHARP KK·Filed 1998·Granted Dec 31, 2002·9 cites·13 claims
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