Inventor · disambiguated record
Jean-Pierre Agnes Henricus Marie Vaessen
Also filed as: VAESSEN JEAN-PIERRE AGNES HENRICUS MARIE
6 granted patents·11 citations·filing 2013–2021
74Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0188US10691030B2Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jun 23, 2020·6 cites·20 claims
- 0280US9958789B2Method of metrology, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted May 1, 2018·2 cites·19 claims
- 0371US10132763B2Inspection method and apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Nov 20, 2018·2 cites·16 claims
- 0470US10705430B2Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·1 cites·20 claims
- 0566US11604419B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2021·Granted Mar 14, 2023·0 cites·20 claims
- 0656US11022897B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2018·Granted Jun 1, 2021·0 cites·20 claims
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