Inventor · disambiguated record
Peter Hanzen Wardenier
Also filed as: WARDENIER PETER H · WARDENIER PETER HANZEN
16 granted patents·335 citations·filing 1989–2023
92Inventor score
Top patents by PatentIndex Score
16 records- 0198US7511799B2Lithographic projection apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 31, 2009·179 cites·11 claims
- 0285US8184265B2Correction method for non-uniform reticle heating in a lithographic apparatusWARDENIER PETER HANZEN·Filed 2009·Granted May 22, 2012·12 cites·15 claims
- 0383US10996573B2Method and system for increasing accuracy of pattern positioningASML NETHERLANDS BV·Filed 2017·Granted May 4, 2021·2 cites·20 claims
- 0482US4952878AMagnetic resonance apparatus having an improved RF coilPHILIPS CORP·Filed 1989·Granted Aug 28, 1990·39 cites·15 claims
- 0580US9958789B2Method of metrology, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted May 1, 2018·2 cites·19 claims
- 0677US9786044B2Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 0770US11580274B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Feb 14, 2023·1 cites·20 claims
- 0870US5450011AMagnetic resonance apparatus having a wideband matching networkPHILIPS CORP·Filed 1993·Granted Sep 12, 1995·37 cites·18 claims
- 0969US12204826B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1067US5742165AMagnetic resonance apparatusPHILIPS CORP·Filed 1996·Granted Apr 21, 1998·29 cites·3 claims
- 1155US5319309AMagnetic resonance device and signal combination devicePHILIPS CORP·Filed 1992·Granted Jun 7, 1994·17 cites·9 claims
- 1249US5272437ARF coil system in a magnetic resonance imaging apparatusPHILIPS CORP·Filed 1991·Granted Dec 21, 1993·13 cites·20 claims
- 1348US11036146B2Method and apparatus to reduce effects of nonlinear behaviorASML NETHERLANDS BV·Filed 2016·Granted Jun 15, 2021·0 cites·21 claims
- 1446US10719011B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Jul 21, 2020·0 cites·20 claims
- 1544US10915689B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Feb 9, 2021·0 cites·21 claims
- 1642US10691863B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Jun 23, 2020·0 cites·20 claims
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