Inventor · disambiguated record
Guanghong Duan
Also filed as: DUAN GUANGHONG
11 granted patents·105 citations·filing 2000–2011
86Inventor score
Top patents by PatentIndex Score
11 records- 0193US6575676B2Parallel structure of a spatial 3-axis machine tool with three degrees-of-freedomUNIV TSINGHUA·Filed 2001·Granted Jun 10, 2003·63 cites·7 claims
- 0280US6402444B1Type of parallel machine tool frame driven by slider and extensible strutUNIV TSINGHUA·Filed 2000·Granted Jun 11, 2002·29 cites·13 claims
- 0373US7339289B2Synchronous permanent magnet planar motorUNIV TSINGHUA·Filed 2005·Granted Mar 4, 2008·8 cites·8 claims
- 0466US8599361B2Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereofZHU YU·Filed 2011·Granted Dec 3, 2013·1 cites·3 claims
- 0566US8284380B2Dual-stage switching system for lithographic machineZHU YU·Filed 2008·Granted Oct 9, 2012·2 cites·5 claims
- 0666US8084897B2Micro stage with 6 degrees of freedomZHU YU·Filed 2008·Granted Dec 27, 2011·2 cites·1 claims
- 0736US7259380B2Scanning mechanism of an ion implanterUNIV TSINGHUA·Filed 2005·Granted Aug 21, 2007·0 cites·12 claims
- 0835US9030648B2Dual wafer stage exchanging system for lithographic deviceZHU YU·Filed 2010·Granted May 12, 2015·0 cites·4 claims
- 0935US8860927B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Oct 14, 2014·0 cites·4 claims
- 1035US8836918B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Sep 16, 2014·0 cites·6 claims
- 1130US9455650B2Two-dimensional locating method of motion platform based on magnetic steel arrayHU JINCHUN·Filed 2011·Granted Sep 27, 2016·0 cites·5 claims
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