Inventor · disambiguated record
Mariko Shimomura
Also filed as: SHIMOMURA MARIKO
6 granted patents·283 citations·filing 1996–1998
87Inventor score
Technology areasH10P
Files withTOSHIBA KK6
Top patents by PatentIndex Score
6 records- 0192US5643406AChemical-mechanical polishing (CMP) method for controlling polishing rate using ionized water, and CMP apparatusTOSHIBA KK·Filed 1996·Granted Jul 1, 1997·115 cites·26 claims
- 0280US5922620AChemical-mechanical polishing (CMP) method for controlling polishing rate using ionized water, and CMP apparatusTOSHIBA KK·Filed 1997·Granted Jul 13, 1999·51 cites·16 claims
- 0373US5968239APolishing slurryTOSHIBA KK·Filed 1998·Granted Oct 19, 1999·40 cites·17 claims
- 0472US5861054APolishing slurryTOSHIBA KK·Filed 1996·Granted Jan 19, 1999·40 cites·15 claims
- 0555US6069083APolishing method, semiconductor device fabrication method, and semiconductor fabrication apparatusTOSHIBA KK·Filed 1996·Granted May 30, 2000·19 cites·7 claims
- 0652US6098638AMethod of manufacturing a semiconductor device and an apparatus for manufacturing the sameTOSHIBA KK·Filed 1996·Granted Aug 8, 2000·18 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →