Inventor · disambiguated record

Dirk Ewoud Boonzajer Flaes

Also filed as: BOONZAJER FLAES DIRK EWOUD

1 granted patent·1 citations·filing 2017–2017

15Inventor score

Technology areasG01N

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0169US10459347B2Inspection method, inspection apparatus and illumination method and apparatusASML NETHERLANDS BV·Filed 2017·Granted Oct 29, 2019·1 cites·17 claims

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