Inventor · disambiguated record
Kensuke Inai
Also filed as: INAI KENSUKE
5 granted patents·2 pending applications·29 citations·filing 2012–2014
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0188US9960056B2Substrate cleaning method, substrate cleaning apparatus and vacuum processing systemTOKYO ELECTRON LTD·Filed 2013·Granted May 1, 2018·10 cites·15 claims
- 0284US9837260B2Cleaning method, processing apparatus, and storage mediumINAI KENSUKE·Filed 2012·Granted Dec 5, 2017·12 cites·9 claims
- 0377US9881815B2Substrate cleaning method, substrate cleaning device, and vacuum processing deviceTOKYO ELECTRON LTD·Filed 2013·Granted Jan 30, 2018·4 cites·8 claims
- 0469US9214364B2Substrate cleaning apparatus and vacuum processing systemDOBASHI KAZUYA·Filed 2012·Granted Dec 15, 2015·3 cites·13 claims
- 0544US10049899B2Substrate cleaning apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Aug 14, 2018·0 cites·4 claims
- 0642US2015027501A1Substrate cleaning method and substrate cleaning apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0740US2015144595A1Gas cluster irradiation mechanism, substrate processing apparatus using same, and gas cluster irradiation methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →