Inventor · disambiguated record
Weidung Yang
Also filed as: YANG WEIDUNG
2 granted patents·14 citations·filing 2007–2007
55Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0180US7627392B2Automated process control using parameters determined with approximation and fine diffraction modelsTOKYO ELECTRON LTD·Filed 2007·Granted Dec 1, 2009·12 cites·20 claims
- 0252US7729873B2Determining profile parameters of a structure using approximation and fine diffraction models in optical metrologyTOKYO ELECTRON LTD·Filed 2007·Granted Jun 1, 2010·2 cites·17 claims
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