Assignee
SORTEC CORP
JP·5 granted patents·226 citations·filing 1991–1994
Technology mixG03F5
Top patents by PatentIndex Score
5 records- 0192US5182610APosition detecting method and device therefor as well as aligning deviceSORTEC CORP·Filed 1991·Granted Jan 26, 1993·122 cites·22 claims
- 0285US5326672AResist patterns and method of forming resist patternsSORTEC CORP·Filed 1992·Granted Jul 5, 1994·49 cites·13 claims
- 0379US5374502AResist patterns and method of forming resist patternsSORTEC CORP·Filed 1993·Granted Dec 20, 1994·34 cites·2 claims
- 0455US5325414AX-ray mask alignment method and apparatus therefor as well as X-ray mask to be used to said method and said apparatusSORTEC CORP·Filed 1993·Granted Jun 28, 1994·12 cites·6 claims
- 0544US5434648AProximity exposure method and machine thereforSORTEC CORP·Filed 1994·Granted Jul 18, 1995·9 cites·7 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →