Assignee
SOFIE
FR·2 granted patents·97 citations·filing 1992–1995
Top patents by PatentIndex Score
2 records- 0179US5648849AMethod of and device for in situ real time quantification of the morphology and thickness of a localized area of a surface layer of a thin layer structure during treatment of the latterSOFIE·Filed 1995·Granted Jul 15, 1997·81 cites·9 claims
- 0248US5355217AAssembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structuresSOFIE·Filed 1992·Granted Oct 11, 1994·16 cites·9 claims
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