Assignee
SOCHA ROBERT
US·2 granted patents·6 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0179US8730452B2Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction ordersSOCHA ROBERT·Filed 2010·Granted May 20, 2014·5 cites·18 claims
- 0266US8395757B2Optimized polarization illuminationSOCHA ROBERT·Filed 2010·Granted Mar 12, 2013·1 cites·14 claims
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