Assignee
SIMULATION PHYSICS INC
3 granted patents·47 citations·filing 1974–1977
Top patents by PatentIndex Score
3 records- 0174US3950187AMethod and apparatus involving pulsed electron beam processing of semiconductor devicesSIMULATION PHYSICS INC·Filed 1974·Granted Apr 13, 1976·19 cites·15 claims
- 0265US4082958AApparatus involving pulsed electron beam processing of semiconductor devicesSIMULATION PHYSICS INC·Filed 1977·Granted Apr 4, 1978·21 cites·5 claims
- 0352US4079285ADielectric guide for electron beam transportSIMULATION PHYSICS INC·Filed 1975·Granted Mar 14, 1978·7 cites·8 claims
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