Assignee
SIMPLUS SYSTEMS CORP
US·14 granted patents·1,543 citations·filing 1999–2002
Top patents by PatentIndex Score
14 records- 0199US6689220B1Plasma enhanced pulsed layer depositionSIMPLUS SYSTEMS CORP·Filed 2000·Granted Feb 10, 2004·658 cites·10 claims
- 0298US6565661B1High flow conductance and high thermal conductance showerhead system and methodSIMPLUS SYSTEMS CORP·Filed 1999·Granted May 20, 2003·307 cites·11 claims
- 0398US6444039B1Three-dimensional showerhead apparatusSIMPLUS SYSTEMS CORP·Filed 2000·Granted Sep 3, 2002·326 cites·11 claims
- 0494US6777331B2Multilayered copper structure for improving adhesion propertySIMPLUS SYSTEMS CORP·Filed 2002·Granted Aug 17, 2004·67 cites·22 claims
- 0591US6572706B1Integrated precursor delivery systemSIMPLUS SYSTEMS CORP·Filed 2000·Granted Jun 3, 2003·39 cites·16 claims
- 0686US6610169B2Semiconductor processing system and methodSIMPLUS SYSTEMS CORP·Filed 2001·Granted Aug 26, 2003·29 cites·17 claims
- 0785US6495449B1Multilayered diffusion barrier structure for improving adhesion propertySIMPLUS SYSTEMS CORP·Filed 2000·Granted Dec 17, 2002·38 cites·24 claims
- 0884US6440219B1Replaceable shielding apparatusSIMPLUS SYSTEMS CORP·Filed 2000·Granted Aug 27, 2002·19 cites·2 claims
- 0979US6221166B1Multi-thermal zone shielding apparatusSIMPLUS SYSTEMS CORP·Filed 2000·Granted Apr 24, 2001·18 cites·11 claims
- 1078US6488272B1Liquid delivery system emulsifierSIMPLUS SYSTEMS CORP·Filed 2000·Granted Dec 3, 2002·16 cites·20 claims
- 1168US6641672B2Replaceable shielding apparatusSIMPLUS SYSTEMS CORP·Filed 2002·Granted Nov 4, 2003·6 cites·17 claims
- 1267US6572707B1Vaporizer for sensitive precursorsSIMPLUS SYSTEMS CORP·Filed 2000·Granted Jun 3, 2003·8 cites·18 claims
- 1362US6670266B2Multilayered diffusion barrier structure for improving adhesion propertySIMPLUS SYSTEMS CORP·Filed 2002·Granted Dec 30, 2003·10 cites·20 claims
- 1451US6609632B2Removable lid and floating pivotSIMPLUS SYSTEMS CORP·Filed 2001·Granted Aug 26, 2003·2 cites·12 claims
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