Assignee
SEMICONDUCTOR EQUIPMENT TECH
3 granted patents·50 citations·filing 1998–1998
Top patents by PatentIndex Score
3 records- 0182USD401252SShield and cover for target of sputter coating apparatusSEMICONDUCTOR EQUIPMENT TECH·Filed 1998·Granted Nov 17, 1998·27 cites·1 claims
- 0264USD401250SShield and cover for target of sputter coating apparatusSEMICONDUCTOR EQUIPMENT TECH·Filed 1998·Granted Nov 17, 1998·13 cites·1 claims
- 0357USD401251SShield and cover for target of sputter coating apparatusSEMICONDUCTOR EQUIPMENT TECH·Filed 1998·Granted Nov 17, 1998·10 cites·1 claims
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