Assignee
PROCESS DIAGNOSTICS INC
US·2 granted patents·23 citations·filing 2001–2001
Top patents by PatentIndex Score
2 records- 0175US6900894B2Apparatus and method for measuring dose and energy of ion implantation by employing reflective opticsPROCESS DIAGNOSTICS INC·Filed 2001·Granted May 31, 2005·18 cites·17 claims
- 0244US6900900B2Apparatus and method for enabling high resolution film thickness and thickness-uniformity measurementsPROCESS DIAGNOSTICS INC·Filed 2001·Granted May 31, 2005·5 cites·17 claims
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