Assignee

PATTON EVAN E

US·1 granted patent·5 citations·filing 2011–2011

Technology mixC25D1 H10P1 H10W1

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1 record

0180US8450210B1Sequential station tool for wet processing of semiconductor wafersPATTON EVAN E·Filed 2011·Granted May 28, 2013·5 cites·16 claims

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