Assignee
PATRICK ROGER
US·4 granted patents·98 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0197US8221582B2Clamped monolithic showerhead electrodePATRICK ROGER·Filed 2008·Granted Jul 17, 2012·67 cites·14 claims
- 0292US8414719B2Clamped monolithic showerhead electrodePATRICK ROGER·Filed 2012·Granted Apr 9, 2013·13 cites·6 claims
- 0387US8216418B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-ringsPATRICK ROGER·Filed 2008·Granted Jul 10, 2012·13 cites·14 claims
- 0480US8187413B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasketPATRICK ROGER·Filed 2008·Granted May 29, 2012·5 cites·21 claims
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