Assignee

MATIX SEMICONDUCTOR

US·1 granted patent·4 citations·filing 2001–2001

Technology mixC04B1 H10P1 H10W1 Y10S1

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1 record

0153US6730931B2Integrated circuit feature layout for improved chemical mechanical polishingMATIX SEMICONDUCTOR·Filed 2001·Granted May 4, 2004·4 cites·18 claims

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