Assignee
LEE DO-HAING
KR·2 granted patents·1 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0160US8450680B2Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate supportLEE DO-HAING·Filed 2011·Granted May 28, 2013·1 cites·7 claims
- 0251US8089042B2Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate supportLEE DO-HAING·Filed 2008·Granted Jan 3, 2012·0 cites·8 claims
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