Assignee

HOFFMANN STEPHAN

DE·1 granted patent·1 pending application·1 citations·filing 2011–2011

Technology mixC11D2 C23G2 H10P2 H01L1

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2 records

0150US9090854B2Method and apparatus for processing wafer-shaped articlesHOFFMANN STEPHAN·Filed 2011·Granted Jul 28, 2015·1 cites·10 claims
0226US2013098391A1Method and apparatus for processing wafer-shaped articlesHOFFMANN STEPHAN·Filed 2011·Application pending·0 cites

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