Assignee
GEBELE THOMAS
DE·0 granted patents·3 pending applications·0 citations·filing 2005–2015
Top patents by PatentIndex Score
3 records- 0137US2007068802A1Substrate carrierGEBELE THOMAS·Filed 2005·Application pending·0 cites
- 0230US2012097093A1Load lock chamber, substrate processing system and method for ventingGEBELE THOMAS·Filed 2010·Application pending·0 cites
- 0326US2015179486A1Load lock chamber, substrate processing system and method for ventingGEBELE THOMAS·Filed 2015·Application pending·0 cites
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