Assignee

GALLAGHER EMILY E

US·3 granted patents·21 citations·filing 2010–2012

Technology mixG03F3

Top patents by PatentIndex Score

3 records

0194US8748063B2Extreme ultraviolet (EUV) multilayer defect compensation and EUV masksGALLAGHER EMILY E·Filed 2012·Granted Jun 10, 2014·12 cites·22 claims
0291US8765331B2Reducing edge die reflectivity in extreme ultraviolet lithographyGALLAGHER EMILY E·Filed 2012·Granted Jul 1, 2014·9 cites·24 claims
0341US8769445B2Method for determining mask operation activitiesGALLAGHER EMILY E·Filed 2010·Granted Jul 1, 2014·0 cites·13 claims

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