Assignee

FEDDER GARY

US·1 granted patent·5 citations·filing 2011–2011

Technology mixB81B1 B81C1 C23F1 G01N1 H10D1

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0181US8471304B2Method, apparatus, and system for micromechanical gas chemical sensing capacitorFEDDER GARY·Filed 2011·Granted Jun 25, 2013·5 cites·17 claims

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