Assignee
EXCEL PRECISION
US·3 granted patents·46 citations·filing 1991–1997
Top patents by PatentIndex Score
3 records- 0153US5379115ADifferential interferometerEXCEL PRECISION·Filed 1991·Granted Jan 3, 1995·17 cites·13 claims
- 0252US5191391AHigh resolution plane mirror interferometerEXCEL PRECISION·Filed 1991·Granted Mar 2, 1993·16 cites·11 claims
- 0349US5991112ANon-contact servotrack writing with phase sensitive detectionEXCEL PRECISION·Filed 1997·Granted Nov 23, 1999·13 cites·20 claims
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