Assignee
AHN JONGPAL
KR·2 granted patents·0 citations·filing 2019–2019
Top patents by PatentIndex Score
2 records- 0123US11359968B2Apparatus and method for adjusting installation location of temperature sensor configured to measure surface temperature of wafer in semiconductor wafer cleaning apparatusAHN JONGPAL·Filed 2019·Granted Jun 14, 2022·0 cites·5 claims
- 0223US11355369B2Method of monitoring surface temperatures of wafers in real time in semiconductor wafer cleaning apparatus and temperature sensor for measuring surface temperatures of waferAHN JONGPAL·Filed 2019·Granted Jun 7, 2022·0 cites·4 claims
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