Assignee
ADP ENGINEERING CO LTD
KR·9 granted patents·89 citations·filing 2007–2008
Top patents by PatentIndex Score
9 records- 0193US7988817B2Lift pin driving device and a flat panel display manufacturing apparatus having sameADP ENGINEERING CO LTD·Filed 2007·Granted Aug 2, 2011·39 cites·12 claims
- 0289US7750818B2System and method for introducing a substrate into a process chamberADP ENGINEERING CO LTD·Filed 2007·Granted Jul 6, 2010·15 cites·15 claims
- 0383US7765682B2Apparatus for attaching substratesADP ENGINEERING CO LTD·Filed 2007·Granted Aug 3, 2010·10 cites·20 claims
- 0481US7980287B2Adhesive chuck and substrate bonding apparatusADP ENGINEERING CO LTD·Filed 2008·Granted Jul 19, 2011·8 cites·22 claims
- 0581US7896046B2Substrate bonding apparatus having alignment unit and method of aligning substrates using the sameADP ENGINEERING CO LTD·Filed 2007·Granted Mar 1, 2011·8 cites·26 claims
- 0679US7770478B2Apparatus and method for measuring chuck attachment forceADP ENGINEERING CO LTD·Filed 2008·Granted Aug 10, 2010·6 cites·17 claims
- 0771US7864289B2Apparatus and method for attaching substratesADP ENGINEERING CO LTD·Filed 2007·Granted Jan 4, 2011·3 cites·20 claims
- 0846US8363377B2Electrostatic chuck and apparatus having the sameADP ENGINEERING CO LTD·Filed 2008·Granted Jan 29, 2013·0 cites·9 claims
- 0946US7640960B2Apparatus for attaching substratesADP ENGINEERING CO LTD·Filed 2007·Granted Jan 5, 2010·0 cites·20 claims
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