Assignee
YASUDA TADAHIRO
JP·4 granted patents·1 pending application·93 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0196US8746057B2Flow rate measuring device and flow rate controllerYASUDA TADAHIRO·Filed 2012·Granted Jun 10, 2014·23 cites·7 claims
- 0295US8443649B2Mass flow controller verifying system, verifying method and verifying programYASUDA TADAHIRO·Filed 2010·Granted May 21, 2013·23 cites·4 claims
- 0389US8744784B2Diagnostic mechanism in differential pressure type mass flow controllerYASUDA TADAHIRO·Filed 2007·Granted Jun 3, 2014·23 cites·13 claims
- 0486US8104323B2Flow controller, flow measuring device testing method, flow controller testing system, and semiconductor manufacturing apparatusYASUDA TADAHIRO·Filed 2007·Granted Jan 31, 2012·24 cites·10 claims
- 0548US2012174990A1Flow rate ratio controlling apparatusYASUDA TADAHIRO·Filed 2012·Application pending·0 cites
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