Assignee
YAO DAPING
US·3 granted patents·2 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0167US8664126B2Selective deposition of polymer films on bare silicon instead of oxide surfaceYAO DAPING·Filed 2012·Granted Mar 4, 2014·2 cites·22 claims
- 0244US9478437B2Methods for repairing low-k dielectrics using carbon plasma immersionYAO DAPING·Filed 2011·Granted Oct 25, 2016·0 cites·20 claims
- 0341US8492177B2Methods for quantitative measurement of a plasma immersion processYAO DAPING·Filed 2011·Granted Jul 23, 2013·0 cites·18 claims
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