Assignee

WORM SVEN

DE·1 granted patent·1 citations·filing 2012–2012

Technology mixB28D1 H10F1 H10P1 Y02E1

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0147US8524008B2Method and device for cleaning substrates on a carrierWORM SVEN·Filed 2012·Granted Sep 3, 2013·1 cites·9 claims

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