Assignee

WEBER JOERN

DE·2 granted patents·3 citations·filing 2011–2011

Technology mixB82Y2 G02B2 G03F2

Top patents by PatentIndex Score

2 records

0168US8928972B2Reflective optical element for EUV lithographyWEBER JOERN·Filed 2011·Granted Jan 6, 2015·3 cites·20 claims
0244US8937709B2Reflective optical element for EUV lithographyWEBER JOERN·Filed 2011·Granted Jan 20, 2015·0 cites·16 claims

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