Assignee

UNIVERITY OF CALIF

US·1 granted patent·13 citations·filing 1991–1991

Technology mixG03F1 G03H1 G21K1

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0152US5455850AX-ray lithography using holographic imagesUNIVERITY OF CALIF·Filed 1991·Granted Oct 3, 1995·13 cites·27 claims

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