Assignee

UNITED MICROELECTRONICS COPR

TW·2 granted patents·7 citations·filing 2000–2002

Technology mixG03F1 H01J1 H10B1 H10W1

Top patents by PatentIndex Score

2 records

0154US6621113B2Self-aligned shallow trench isolationUNITED MICROELECTRONICS COPR·Filed 2002·Granted Sep 16, 2003·7 cites·4 claims
0237US6541782B2Electron beam photolithographic processUNITED MICROELECTRONICS COPR·Filed 2000·Granted Apr 1, 2003·0 cites·6 claims

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