Assignee

TOSOH SMD

US·1 granted patent·74 citations·filing 2001–2001

Technology mixB23K1 C23C1 H01J1 Y10T1

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0193US7146703B2Low temperature sputter target/backing plate method and assemblyTOSOH SMD·Filed 2001·Granted Dec 12, 2006·74 cites·13 claims

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