Assignee
TERASHIMA SHIGERU
JP·1 granted patent·1 pending application·7 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0186US8686378B2Charged particle beam drawing apparatus, and method of manufacturing articleTERASHIMA SHIGERU·Filed 2012·Granted Apr 1, 2014·7 cites·9 claims
- 0239US2012183905A1Charged-particle beam drawing apparatus and article manufacturing methodTERASHIMA SHIGERU·Filed 2012·Application pending·0 cites
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